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直流高压电源作为离子注入机的重要组成部分,其控制方式、工作频率、拓扑结构等的差异,都会对注入机系统运行效率和稳定性产生巨大的影响。离子注入机系统使用直流高压电源为离子加速系统提供能量,加速电压通常在5k V-100k V之间,离子束电流强度小于50mA。本文主要论述了一种小型直流高压电源的线路结构和中频倍压整流电路的优化设计。实验结果表明该直流高压电源不仅稳定度高、可靠性好、操控方便,并且更加小型化。
DC high-voltage power supply as an important part of ion implanter, the control mode, operating frequency, topology and other differences will have a huge impact on the injection machine system operating efficiency and stability. Ion implanter systems use a DC high-voltage source to power an ion acceleration system. The accelerating voltage is typically between 5k V and 100k V, and the beam current intensity is less than 50mA. This paper mainly discusses the circuit structure of a small DC high voltage power supply and the optimal design of the IF voltage doubler rectifier circuit. The experimental results show that the DC high voltage power supply not only has high stability, good reliability, convenient operation and more miniaturization.