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使用油扩散泵获得超高真空方法最早是由Alport[1]用铜箔阱防止油蒸气逆向扩散开始的。其后 Biondi[2]发表了使用活性A12O3阱的报导。斋藤等[3],郭元恒及顾惕人[4]采用其它吸附剂用于吸 附阱获得超高真空。 本文报导了我们制备的活性A12O3用于吸附阱,获得超高真空的一些性能和制备方法以及吸附阱 的温度与真空度间的关系等方面的研究和分析。
The use of oil diffusion pumps to achieve ultrahigh vacuum was first initiated by Alport [1] using a copper foil trap to prevent reverse vapor diffusion. Later Biondi [2] published a report using the active A12O3 trap. Saito et al. [3], Guo Yuanheng and Gu Tiren [4] used other adsorbents for adsorption wells to achieve ultra-high vacuum. This paper reports the research and analysis of some properties and preparation methods of activated A12O3 for adsorption traps, ultrahigh vacuum and the relation between the temperature and the vacuum degree of adsorption traps.