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以甲烷(CH4)为前躯体,采用等离子体增强化学气相沉积(PECVD)技术,在单晶硅基底表面制备类富勒烯纳米结构类金刚石薄膜(FL-C∶H)。采用高分辨透射电镜(HRTEM)、拉曼光谱仪(LABRAM)和多功能X射线光电子能谱仪(XPS)对薄膜的结构进行表征;利用原位纳米力学测试系统、摩擦磨损试验机、三维轮廓仪和奥林巴斯STM6光学显微镜分析比较薄膜在不同摩擦时间阶段的摩擦行为及磨痕处硬度变化情况。实验结果表明,所制备的类金刚石薄膜具有类富勒烯纳米结构特征,在摩擦过程中并未发生石墨化,而是sp2键合结构减少,使得磨痕处的硬度随着摩擦时间的增加而增大。
A fullerene-like nanostructured diamond-like carbon film (FL-C: H) was prepared on the surface of monocrystalline silicon by plasma enhanced chemical vapor deposition (PECVD) using methane (CH4) as a precursor. The structure of the films was characterized by high resolution transmission electron microscopy (HRTEM), Raman spectroscopy (LABRAM) and multifunctional X-ray photoelectron spectroscopy (XPS). The in-situ nano mechanical testing system, friction and wear testing machine, And Olympus STM6 optical microscopy analysis of the friction at different friction time and the wear of the film at the Department of hardness changes. The experimental results show that the prepared diamond-like carbon films have the fullerene-like nanostructures, and the graphitization does not occur during the rubbing process, but the sp2 bonding structure is reduced, so that the hardness at the wear scar increases with the friction time Increase.