论文部分内容阅读
We presents a new type of film thermocouple temperature sensor composited by metal and silicon carbide (SiC) based on micro-electro-mechanical system (MEMS) technology in order to establish temperature testing systems for aero engine turbine under a harsh working environment.The principles of the sensor,such as the Seebeck effect of metal,the heat transfer model and thermal stress in films,were studied and the mechanical model and mathematical solutions were established.The working mechanism and the process were researched to optimize the sensor.The test platform was built to test the performances of the sensor.The experiment shows the sensor has an acceptable linearity up to 1070K with a suitable voltage output and rise time,and the average Seebeck coefficient is 15uv/K.