Flux-mediated epitaxy of 3C-SiC films on 4H-SiC (0001) substrates

来源 :2013 International Symposium on Integrated Molecular / Mater | 被引量 : 0次 | 上传用户:llljjjxxx777
下载到本地 , 更方便阅读
声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架
论文部分内容阅读
Silicon carbide (SiC) has properties suitable for high-power, high-frequency and high-temperature devices.Among its polythypes the cubic (3C) SiC-based MOSFET has attracted most attention due to its higher n-channel mobility than those of other hexagonal types of SiC [1].However, SiC has some problems in its crystal quality, which include controlling its polytypes and decreasing defects.
其他文献
Photonic crystals are a class of materials that possesses spatially periodical dielectric constant, which can strongly modulate electromagnetic waves and drive a photonic stop-band.The propagation of
会议
Enzymes are truly outstanding catalysts with the ability to acceleratc the rate of chemical reactions.Nevertheless, the use of enzymes in chemical processes is limited by their stabilities against bio
会议
Room temperature ionic liquid (RTIL) is a kind of salt which can stay as liquid even at roomtemperature.The most fascinate feature ofthe RTIL is negligible vapour pressure, which allows us to put RTIL
会议
Exploration of new molecular chirality and its functions is of tremendous importance from not only scientific but also technological and industrial perspectives.Of the different types of molecular chi
会议
INTRODUCTION π-Conjugated polymers possessing elements or elements-containing building blocks (i.e., elements-blocks) are expected to exhibit unique functions originated from the nature of the element
会议
The crystalline and melting behavior of several different types of polymer thin films with different thickness placed on Si wafer and PVPh covered Si wafer was studied.Grazing incident X-ray diffracti
会议
In recent year, optically active gels and magnetic gels have received substantial interest because of their unique structure, properties and significant application.However, there is no research focus
会议
A demultiplexer module at telecommunication wavelengths is important for future high bandwidth networks.Light-induced self-written (LISW) waveguides are advantageous because of their simple process of
会议
Silvered polyimide nanocomposite films have attracted tremendous attention from both the technical applications and theoretical scientific communities in recent years.Herein, silver nanolayers with co
会议
Size-quantized semiconductor nanoparficles, such as CdSe, CdTe or PbS, have attracted much attention for the applications of light energy conversion systems, because their light-harvesting properties
会议