论文部分内容阅读
在设计和制造大规模集成电路中,迫切需要缩短定型生产的周期,因此,为了增加版面设计和工艺灵活性,普遍采用和引进多种程序表。这些主要是:系统产品组织的重要计划,应是如何尽快地实现在目前的商业半导体活动中还没有出现的新产品。 这次会议的重点活动将提供以下报告 一个自动生产线,它不仅能够自(?)地操纵设备控制、晶片流程、数据收集/分析,沾污控制等。而且容许有关电子束曝光的重要设计,使大量的适时式样的计算机逻辑电路能够实现。
There is an urgent need to shorten the cycle of stereotypes in the design and manufacture of large scale integrated circuits. Therefore, in order to increase the layout design and process flexibility, a variety of program tables are commonly adopted and introduced. These are mainly: The important plan of the system product organization should be how to realize the new products that have not appeared in the current commercial semiconductor activities as soon as possible. The focus of the conference will be to provide the following report an automated production line that will not only be able to manipulate equipment controls, wafer processes, data collection / analysis, contamination control and more. But also allow for important design related electron beam exposure, so that a large number of timely style of computer logic circuit can be achieved.