论文部分内容阅读
简介纳米压痕系统的基本原理及其关键部件施载传感器和扫描传感器的设计方法。最后,阐述施载/描扫集成结构的实现。
Introduction The basic principle of nanoindentation system and its key components Shi sensor and scanning sensor design method. Finally, the implementation of the load / sweep integrated structure is described.