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运用约束刻蚀剂层技术(CELT)在金属镍(Ni)表面实现三维微图形加工,以规整的三维齿状微结构作模板,获得可有效CELT加工的化学刻蚀和捕捉体系,在Ni表面得到了与齿状结构互补的三维微结构并应用扫描电子显微镜(SEM)和原子力显微镜(AFM)表征刻蚀图案,证实CELT可用于金属表面Ni的三维微图形刻蚀加工.
A three-dimensional micro-patterning process was performed on the surface of nickel metal by constrained etchant layer technology (CELT). A regular three-dimensional dentate microstructure was used as a template to obtain a chemical etching and capturing system that can effectively process CELT. The three-dimensional microstructure complementary to the dentate structure was obtained and characterized by scanning electron microscopy (SEM) and atomic force microscopy (AFM). The results show that CELT can be used for three-dimensional micro-patterning of Ni on metal surface.