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本文介绍用四极场残余气体分析仪对行波管排气过程进行气体分析。观察了各个阶段中气体成分的变化,为排气规范的调整提供实验依据。
This article describes the use of quadrupole residual gas analyzer traveling wave tube exhaust gas process. The changes of gas composition in each stage were observed to provide experimental evidence for the regulation of exhaust gas.