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纳流控学和纳流控芯片应用于化学和生化分析的研究近年来取得了长足的进展。纳流控的基础和应用研究以纳流控芯片的研制为基础,而纳流控芯片的制备需依靠微纳加工技术。本文着重介绍目前已经建立的纳流控芯片加工技术,包括掩膜加工法、牺牲层技术、模具加工法、化学-机械抛光法、机械拉伸技术以及其他的加工技术。此外,还简单介绍了纳流控芯片在试样预处理以及生化分析中的应用。
In recent years, nanofluidics and nanofluidic chips have been used in chemical and biochemical analysis. The basis and application research of nanofluidics is based on the research of nanofluidic chips, while the fabrication of nanofluidic chips depends on the micro-nanofabrication technology. This article focuses on the currently established nanoflow control chip processing technology, including mask processing, sacrificial layer technology, mold processing, chemical - mechanical polishing, mechanical stretching and other processing technologies. In addition, the application of nanofluidic chips in sample pretreatment and biochemical analysis is briefly introduced.