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本文研究了背面照射薄型CCD(汤姆逊无线电通信公司的TH7395A)在10至20 nm光谱范围内的响应。我们介绍用以检查综合工科学校激光等离子源的读出装置,并且把实验室结果同理论模拟作了比较。计算结果与实验结果符合得很好,磕的L吸收谱线在12.3 nm附近给出了人们所期望的灵敏度不连续性。本文提供了这种CCD器件在被查光谱范围内的相对光谱响应。我们同时还介绍两个配有这种探测器的装置:一台工作波长为19.5 nm的软X射线Schwarzschild显微镜和一台工作波长为1至4 nm的软X射线分光计。在激光-物质互作用实验中用这些装置获得的结果表明,灵敏度相对通常使用的胶片已有很大提高。
This article studies the response of a backside illuminated thin CCD (TH7395A by Thomson Radiocommunications) over a 10 to 20 nm spectral range. We introduce a read-out device for inspecting laser plasma sources in an integrated engineering school and compare laboratory results with theoretical simulations. The calculated results are in good agreement with the experimental results. The L absorption line of Ke knocking gives the expected discontinuity of sensitivity near 12.3 nm. This article provides the relative spectral response of this CCD device over the investigated spectrum. We also introduce two devices equipped with this detector: a soft X-ray Schwarzschild microscope operating at 19.5 nm and a soft X-ray spectrometer operating at 1 to 4 nm. The results obtained with these devices in the laser-material interaction experiments show that the sensitivity has been greatly improved over the films commonly used.