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本文介绍一种低损耗SAW换能器和元件的全新设计方法,该方法使用特殊的非对称晶体取向。在存在于普通压电晶体中的这些新取向上可做出具有单向响应的单层次、均匀、每波长俩电极的换能器。与低损耗三相换能器比较,这种换能器不需要气隙桥接,而且所有电极和间隔宽度均为λ/4。因此用这种方法易于制作高频低损耗的SAW换能器。 描述这种新型单相单向换能器的工作原理,给出试验结构的测试结果。结果证明石英和liNbO_3中均有制作这种换能器的取向。实验结果与新发展的耦合模分析结果的一致性良好。
This article describes a new design method for low loss SAW transducers and components using a special asymmetric crystal orientation. With these new orientations found in ordinary piezoelectric crystals, transducers with a single-layer, uniform, two electrodes per wavelength with a one-way response can be made. Compared with low-loss three-phase transducers, this transducer does not require air gap bridging, and all electrodes and spacing width are λ / 4. Therefore, this method is easy to make high-frequency low loss SAW transducer. Describe the working principle of this new single-phase unidirectional transducer and give the test results of the test structure. The results show that both the quartz and liNbO_3 make the orientation of this transducer. The experimental results are in good agreement with the newly developed coupled-mode analysis results.