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Recent rapid advances in microelectromechanical system (MEMS) have facilitated the applications of various oscillating microstructures including micro-resonant, micro-filters and micro-actuators.In these micro oscillatory MEMS structures, air damping plays a critical role and becomes a main cause of energy dissipation.When air gap becomes smaller, we need to consider the rarefaction effect in viscous damping.In the present study, we have used lattice Boltzmann (LB) method to investigate unsteady non-equilibrium Stokes-type flow damping in a micro-comb.