Determination of Thickness and Optical Constants for Nickel Ultra-thin Films Using Ellipsometry Iter

来源 :International Conference on Nanoscience & Technology,China 2 | 被引量 : 0次 | 上传用户:yh603469940
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  Accurate determination of thickness and optical constants for ultra-thin absorbing film is significant in the field of surface science.In this paper, thin nickel films with different thicknesses were deposited onto quartz substrate by thermal evaporation.The ellipsometry parameters and transmittance spectra of the samples in the wavelength range of 300 nm ~ 1000 nm were collected by Spec Ellipsometer (J.A.Woollam Co., Inc.M-2000U) and spectrophotometer (Shimazu Co., Inc.SolidSpec-3700), respectively.
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