Study on C/C Composite Chemical Vapor Deposition Equipment

来源 :第二届中国国际复合材料科技大会 (CCCM-2) | 被引量 : 0次 | 上传用户：wangshuanghong2009

【摘要】

：

　　Considering the process characteristics of C/C composite chemical vapor deposition (CVD), this paper studies controlling technologies of the temperature fie

【作者】

：

DaiYu;HuXianglong;HuGaojian;

【机构】

：

Advanced Corporation for Materials & Equipment Co.,Ltd.,Hunan Changsha 410118,China

【出处】

：

第二届中国国际复合材料科技大会 (CCCM-2)

【发表日期】

：

2015年期

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　　Considering the process characteristics of C/C composite chemical vapor deposition (CVD), this paper studies controlling technologies of the temperature field, flow field and by-product recycle of CVD equipment.The study indicates that proper structure and design of temperature field, flow field and exhaust treatment system can significantly improve the continuous and stable operation of CVD equipment, thus playing an important role in the production of high quality C/C composite.

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