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AZO/Ag/AZO multilayer films were deposited on polymer substrate by facing targets sputtering (FTS) at room temperature.
Properties of AZO/Ag /AZO multilayer thin films deposited on polymer substrate
【摘 要】
：
AZO/Ag/AZO multilayer films were deposited on polymer substrate by facing targets sputtering (FTS) at room temperature.
【机 构】
：
Department of electrical engineering, Kyungwon University, Seongnam, 461-701, Republic of Korea
【出 处】
：
2011年第三届微电子及等离子体技术国际会议
【发表日期】
：
2011年9期
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