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  5. Electrical and optical properties of Indium Zinc Tin Oxide thin film for OLED Anode

Electrical and optical properties of Indium Zinc Tin Oxide thin film for OLED Anode

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：cxy8933
【摘 要】
：
Indium Zinc Tin Oxide (IZTO) thin films for OLED anode were prepared by using a Facing Target Sputtering (FTS) system under the various sputtering conditions.
【作 者】
：
Kyu Ho Lee Hyung-Wook Choi Kyung Hwan Kim 
【机 构】
：
Department of electrical engineering, Kyungwon University, Seongnam, 461-701, Republic of Korea
【出 处】
：
2011年第三届微电子及等离子体技术国际会议
【发表日期】
：
2011年9期
【关键词】
：
Indium Zinc Tin Oxide TCO OLED anode 
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Indium Zinc Tin Oxide (IZTO) thin films for OLED anode were prepared by using a Facing Target Sputtering (FTS) system under the various sputtering conditions.
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