ETCHING相关论文
在二元光学衍射微透镜的制作工艺中, 光刻胶的行为和特性对衬底的最终图形有着极为重 要的作用。光刻和刻蚀两道工序都要求实际图......
报道了采用Cl2/N2电感耦合等离子(ICP)组合体刻蚀工艺在InAs/GaSb II类超晶格红外焦平面台面加工过程中的研究结果, 实验采用分子......
针对传统电路板集成方式的局限性,提出基于飞秒激光的覆铜板线路成形技术。采用飞秒激光对覆铜板进行单因素实验和正交实验,结果表......
利用深反应离子刻蚀技术或湿法腐蚀在硅上制作光栅结构,将与光栅浸润的液体作为载体携带铋纳米颗粒进入光栅结构内,形成致密排列,......
用微波等离子体化学气相沉积法（ MPCVD）在氧化铝陶瓷衬底上成功地制备出具有 [100] 织构的金刚石薄膜，并对该薄膜进行了 X射线衍射（ XR......
A novel low-loss 50-Ω coplanar waveguide with V-groove on an SOI substrate is proposed.Through a CMOS-compatible proces......
制备了一种新型抗辐照SOI隔离结构,它包含了薄SiO2/多晶硅/SiO2多层膜.利用这种结构制备的SOI器件在经受3×105rad(Si)的辐照后亚......
O644.18 2006032084激光化学液相次序选择腐蚀新方法=A new order-selec-tive etching method in laser induced wet-chemical etc......
Experimental investigation was performed with a 1064-nm,10-ns Nd:YAG laser to determine the effects of the surface hydro......
A two-step process of Ni silicide formed on bulk silicon,and the effects of different process conditions,including two-s......
This paper describes a new method to create nanoscale SiO 2 pits or channels using single-walled carbon nanotubes (SWNTs......
A ball grid array (BGA) package based on Si interposer with through silicon via (TSV) was designed. Thermal behaviors of......
We demonstrate and introduce here a pyramidally patterned metal reflector into wafer-bonding AlGaInP light emitting diod......
Chloride-based fast homoepitaxial growth of 4H-SiC epilayers was performed on 4° off-axis 4H-SiC substrates in a home-m......
We propose a novel silicon optical phase shifter structure based on heterogeneous strip-loaded waveguides on a photonic ......
We demonstrate an ultra-low-threshold phonon laser using a coupled-microtoroid-cavity system by introducing a novel coup......
We experimentally demonstrate high optical quality factor silica microdisk resonators on a silicon chip with large wedge......
A microstructural analysis was performed to determine the presence of oxygen in a wire rod section of AISI 1008 steel wi......
近十年来,高分子粘合材料在口腔科的应用,发展甚快,其种类日益增多,应用范围亦不断扩大。特别在直接粘着矫正附件,牙体缺损修复,......
This paper describes the design and fabrication of superconducting hot electron bolometer (HEB) mixer based on ultra-thi......
The ion beam mixing prepared SiC films on stainless steel substrates were irradiated by hydrogen ion beam with an energy......
The novel material of photonic crystal makes it possible to control a photon, and the photonic integration will have bre......
A high etch rate GaAs via-hole process was studied in an inductively coupled plasma system using Cl2/BCl3 gas system. Th......
The punching thru mechanism of gate oxide (thickness about 15A) was investi- gated. Because of the thin thickness of gat......
We developed a simplified nanofabrication process for imprint templates by fast speed electron beam lithography(EBL) and......
Nanoarchitectonics provide versatile opportunities for modifying the properties of coordination polymers (CP) other than......
This paper tries to introduce the reader to the method of using photochemical re-action to copy holographic optical ele......
The Lunar new Year is the most important traditional festival for Chinese. During the holiday, posting new Year Painting......
Reactive ion etching(RIE) of LiNbO_3(LN) in SF_6 plasma atmosphere was studied for optimizing the preparation conditions......
This paper proposes a novel miniature dual-functional sensor integrating both pressure and temperature sensitive units o......
该文从挂篮荷载计算、施工流程、支座及临时固结施工、挂篮安装及试验、合拢段施工、模板制作安装、钢筋安装、混凝土的浇筑及养生......
介绍了多碱阴极的特点及其在超二代像增强器中的应用。叙述了多碱阴极进行制作和封接，之后在XPS 分析仪器的预真空室中进行解封并送......
Synthesis, characterizations and hydrophobicity of micro/nano scaled heptadecafluorononanoic acid de
Copper nanoparticle was synthesized in the presence of heptadecafluorononanoic acid by the conventional solution immersi......
石墨烯的转移过程决定着石墨烯的品质,进而对石墨烯基器件的性能有重要的影响。针对化学气相沉积(CVD)法生长的石墨烯在湿法转移过......
The Effect of Surface Etching and Dation on the Permeability Spectrum of Nanocrystalline Fe85-x CoxN
Etching and oxidation were adopted to improve the frequency dependence of permeability of ranocrystalline Fe85-xCoxNb7B8......
A new procedure was proposed for evaluating the weldability of nickel-base superalloys.The theory is on the basis of two......
The morphologies of tunnel tips in diferent stages for aluminum foils during DC etching in 1.5 mol/L HCl solution at 90 ......
本文针对激光应用于牙釉质蚀刻与再蚀刻的研究进展进行了系统地综述.研究包括激光蚀刻和再蚀刻牙釉质的表面微结构,托槽的抗剪切强......
为探究吕家坨井田地质构造格局,根据钻孔勘探资料,采用分形理论和趋势面分析方法,研究了井田7......
为探究吕家坨井田地质构造格局,根据钻孔勘探资料,采用分形理论和趋势面分析方法,研究了井田7......
It is well-known that fluorinated polymers are very unique polymer materials because of their distinguished properties, ......
目的 研究紫外线照射条件下,酸蚀时间及粘接剂的固化形式对正畸粘接剂去除后牙面颜色稳定性的影响.方法 筛选色度为A3.5的前磨牙30......
Amorphous InGaZnO (a-IGZO) film is deposited on the glass substrate by radio-frequency sputtering and the influence of a......
The surface treatments on CdSe wafers were studied by means of SEM, XPS and micro-current test instrument. The relations......
Metallographic etching and microstructure characterization of NiCrMoV rotor steels for nuclear power
The grain size of prior austenite has a distinct influence on the microstructure and final mechanical properties of stee......
An increasing {110} orientation degree behavior was observed during etching of chemical vapor deposition (CVD) diamond f......
SiC substrates grown by the sublimation method still have high densities of structural defects such as dislocations, mic......
主要研究了利用分子动力学方法(MD)模拟等离子体与材料表面相互作用过程时分子动力学方法的参数对模拟结果的影响.详细分析了Beren......
A high etch rate GaAs via-hole process was studied in an inductively coupled plasma system using Cl2/BCl3 gas system. Th......
Gallium nitride (GaN) epilayers with nanopore arrays were fabricated by inductive coupled plasma (ICP) etching using ano......
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