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用微机械加工技术制备了微型葡萄糖传感器和钾离子选择电极并将它们集成于同一芯片上。本文设计的锥形微腔陈列结构提供了大批量生产多功能集成生物和化学传感器的可能性。
Micro-glucose sensors and potassium ion selective electrodes were fabricated using micromachining techniques and integrated on the same chip. The tapered microcavity display structure designed in this paper offers the possibility of mass production of multifunctional integrated biological and chemical sensors.