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为研究探索新材料，采用离子束溅射沉积的方法制备了子层厚度为纳米量级的陶瓷／金属以及陶瓷／高分子多层膜。对这些纳米多层膜的结构和硬度、韧性行为进行了研究。发现纳米多层膜的硬度行为强烈地依赖于材料系统，在某些系统中出现了超硬度效应，而在某些系统则没有这一现象。纳米多层膜的韧性比单相的陶瓷材料有明显提高。硬度、韧性等力学行为与多层结构的组分比例、调制波长等参数有关。研究表明纳米多层结构是获取具有优良力学性能新材料的有效途径。
In order to explore and explore new materials, ceramic / metal and ceramic / polymer multilayer films with sublayer thickness of nanometers were prepared by ion beam sputtering deposition. The structure, hardness and toughness of these nano-multilayers were studied. The hardness behavior of the nanofilms was found to be strongly dependent on the material system, with superhardness effects in some systems, but not in some systems. The toughness of the nano-multilayer film is significantly higher than the single-phase ceramic materials. Mechanical properties such as hardness and toughness are related to the composition ratio of the multilayer structure and the modulation wavelength. Studies have shown that nano-multilayer structure is an effective way to obtain new materials with excellent mechanical properties.