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本文根据实践数据,总结归纳了晶片的倒边量、电极形状以及微调掩膜孔尺寸对TCXO用石英晶体谐振器产品FDLD指标的影响,并就相关性作了简单的分析。
Based on the practical data, this paper summarizes the impact of wafer undercut, the shape of electrodes and the size of trimming mask hole on the FDLD index of TCXO quartz crystal resonators, and makes a simple analysis of the correlation.