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本文叙述我所研制的轮廓光电自动调焦的原理。实验证明:移动范围在±10μm时,重复精度为±0.5μm;大于±10μm 时,重复精度为±1μm。
This article describes the principle of contour photoelectric self-focusing developed by me. The experimental results show that the repeatability is ± 0.5μm when the moving range is ± 10μm and the repeatability is ± 1μm when the moving range is ± 10μm.