【摘 要】
：
The buffer layer CeO_2 films were grown on cube textured metallic Ni substrates by using reactive magnetron sputtering. Ar/H_2 mixed atmosphere, which effective
【出 处】
：
Journal of Rare Earths
论文部分内容阅读
The buffer layer CeO_2 films were grown on cube textured metallic Ni substrates by using reactive magnetron sputtering. Ar/H_2 mixed atmosphere, which effectively inhibited the formation of NiO, was used as pre-depositing gas before CeO_2 films were grown in Ar and O_2. At 700 ℃ under the total pressure of 26 Pa, the pure c-axis orientation film was obtained. X-ray θ-2θ scan, pole figure and Φ-scan were used to observe the microstructure of the buffer layer. The results show that CeO_2 film has strong cube texture and the FWHM is 9°. In addition, the CeO_2 film is dense and crack-free.
The buffer layer CeO_2 films were grown on cube textured metallic Ni substrates by using reactive magnetron sputtering. Ar / H_2 mixed atmosphere, which substantially inhibited the formation of NiO, was used as pre-depositing gas before CeO_2 films were grown in Ar and O_2. X-ray θ-2θ scan, pole figure and Φ-scan were used to observe the microstructure of the buffer layer. The results show that CeO 2 film has strong cube texture and the FWHM is 9 °. In addition, the CeO 2 film is dense and crack-free.
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