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利用等离子体浸没式注入(PⅢ)技术,使用O2,N2,CO和CO2做气体源,对镀镍铜框架表面进行处理。拉力测试实验结果表明,与未经处理的空白框架相比,经过CO和CO2等离子体注入处理的镀镍铜框架与环氧塑封料(EMC)间的附着力分别提高了约35倍和12倍,而在使用O2和N2等离子体注入处理的情况下,附着力基本没有变化。通过扫描电子显微镜(SEM)对处理前后的框架表面观察,发现PⅢ处理并未引起表面粗糙度的显著变化。利用X射线电子能谱(XPS)分析,可以发现在经过CO或CO2等离子体注入处理后的框架表面有羰基出现。基于这些结果,分析了导致附着力提升的机理。
The surface of the nickel-plated copper frame is treated by plasma immersion injection (PⅢ) using O2, N2, CO and CO2 as the gas source. The tensile test results show that the adhesion between the nickel-plated copper frame and the epoxy molding compound (EMC) after CO and CO2 plasma injection treatment is increased by about 35 times and 12 times, respectively, compared with the untreated blank frame , While in the case of O2 and N2 plasma implantation, there was almost no change in adhesion. Observation of the surface of the frame before and after treatment by a scanning electron microscope (SEM) revealed that the PIII treatment did not cause a significant change in the surface roughness. Using X-ray photoelectron spectroscopy (XPS) analysis, carbonyl groups appeared on the surface of the framework after CO or CO2 plasma implantation. Based on these results, the mechanism that led to the improvement of adhesion was analyzed.