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引信可以利用空中目标运动产生的静电场信息对目标进行探测,而MEMS的特殊性能非常适合于引信静电探测器的设计。在引信有限的体积内布设MEMS静电探测阵列,通过对目标静电场信息进行检测,可以获得目标的位置和速度信息。本文运用表面加工工艺设计了一种MEMS薄膜电极的垂直振动式电场传感器阵列。介绍了该电场传感器探测单元及阵列的结构、组成及工作原理,说明了该器件的加工工艺。通过MEMS静电探测单元的空间布阵,研究了引信MEMS静电探测阵列对目标定位的原理,推导了目标定位的公式,使用MEMS静电探测阵列探测了目标的静电场,实现了对目标位置的定位。
The fuze can detect the target by using the information of the electrostatic field generated by the air target movement, and the special performance of the MEMS is very suitable for the design of the fuze electrostatic detector. In the limited volume of fuze layout MEMS electrostatic detection array, by detecting the target electrostatic field information, you can get the target position and velocity information. In this paper, a vertical vibrating electric field sensor array of MEMS thin film electrodes is designed by using surface processing technology. The structure, composition and working principle of the electric field sensor detection unit and array are introduced, and the fabrication process of the device is illustrated. Through the spatial arrangement of the MEMS electrostatic detection unit, the principle of positioning the target by the fuze MEMS electrostatic detection array is studied. The formula of the target positioning is deduced. The electrostatic field of the target is detected by the MEMS electrostatic detection array, and the target position is achieved.