论文部分内容阅读
以原子力显微镜(AFM)为加工工具进行了纳米级加工实验,对不同加工条件下的材料去除过程和切屑形态进行了研究.切屑形态通过扫描电子显微镜(SEM)进行观察,分析了不同垂直载荷、循环次数和针尖加工方向下铝铜被加工表面的切屑形成过程.实验结果表明:低载下切屑呈细小断屑,散布在加工区域周围;随着垂直载荷的增加,切屑逐渐变成连续的带状切屑.不同循环次数、针尖加工面对切屑形成都有很大影响.在此基础上,对比分析了相同实验条件下,不同力学性能材料的切屑形成过程.最后,通过检测被加工表面得出被加工表面质量与切屑的数量和形态之间的关系,提出了改善被加工表面质量的方法,以帮助人们更好地理解基于AFM的纳米级加工技术.
Nanofabrication experiments were carried out with AFM as the processing tool, and the material removal process and chip morphology under different processing conditions were studied. The chip morphology was observed by scanning electron microscope (SEM), and the effects of different vertical loads, The number of cycles and the direction of chip processing on the machined surface of the aluminum-copper plate were studied.The experimental results show that the chip is finely chip-broken and scattered around the processing area under low load, and the chip gradually becomes continuous with the increase of vertical load Like chips.During the different cycles, the tip machining has a great influence on the chip formation.On the basis of this, the chip formation processes of different mechanical properties under the same experimental conditions are compared and analyzed.Finally, The relationship between the surface quality and the number and shape of the chips has been put forward to improve the quality of the surface to be machined so as to help people better understand the AFM-based nano-fabrication technology.