Study of active beam steering system with a simple method

• 作 者: 王俊 黄立华 侯莉颖 何国俊 宋强 黄惠杰
• 机 构: Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,
• 出 处: Chinese Optics Letters
• 发表日期: 2014年08期
• 关键词: pointing stabilization steering reconstruct lithography calibration stabilize mi

We develope a simple method to stabilize the beam during propagation. Combination of the self-developed control module and the large diameter mirrors reconstruct the beam stabilization system, and some important procedures are presented, such as calibration and average filter. The results show that the horizontal pointing and vertical pointing are stabilized to within 8.43 and 7.59 μrad, and the beam horizontal position and vertical position are stabilized to within 2.16 and 2.11 μm respectively. The regulating time is within84 ms. Thus the method presented is effective for the current stabilization system applied in lithography tools.

We develope a simple method to stabilize the beam during propagation. Combination of the self-developed control module and the large diameter mirrors reconstruct the beam stabilization system, and some important procedures are presented, such as calibration and average filter. The results show that the horizontal pointing and vertical pointing are within 8.43 and 7.59 μrad, and the beam horizontal position and vertical position are stabilized to within 2.16 and 2.11 μm respectively. The regulating time is within 84 ms. applied in lithography tools.