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本文建立了高速(100kHz)计算机数据采集系统,研究了二分式率窗、正弦窗等几种新的深能级瞬态讯号处理方法和谱线的后处理方法,编制了全部机器语言软件在计算机数据采集系统上实现了这些方法。该系统硬件简单、处理方法灵活,可给出高质量的DLTS谱线,通过后处理还可进一步提高分辨率和信噪比,可用于各种场合下的实时测量。利用该系统对硅中金受主能级进行测量,所得结果与文献报导相一致。
In this paper, a high-speed (100kHz) computer data acquisition system is established. Several new deep-level transient signal processing methods such as bisection rate window and sine window are studied, and spectral post-processing methods are also developed. All the machine language software is programmed in computer These methods are implemented on data acquisition systems. The system is simple in hardware and flexible in processing. It can provide high-quality DLTS spectrum, and can further improve the resolution and signal-to-noise ratio through post-processing. It can be used for real-time measurement in various occasions. This system is used to measure the gold acceptor level in silicon, and the results are consistent with those reported in the literature.