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传感器以硅材料为主体,采用各种新材料,制成了各种各样类型,广泛应用于民生机器、产业机器、工业测试设备上,其研究与发展十分活跃.传感器技术利用集成电路技术、薄膜技术、精细加工技术,实现微细化、高集成化、多功能化和高可靠性,取取了惊人的发展. 传感器的感测对象从温度到微生物,范围很广,种类繁多.传感器因用途不同而使用不同的材料、不同的生产技术.这里仅就物理传感器、化学传感器、生物(离子)传感器的发展动向作一简单介绍. 物理传感器——采用精细加工技术制成了微型膜盒式压力传感器、集成电路化微型探头.这种压力传感器将硅进行底部切割腐蚀蚀刻,形成空洞,再用氮化硅将空洞封闭而成,适宜在超小型情况下使用.而微型探头是将进行腐蚀蚀刻,作成探针,
The sensor is based on silicon material, using a variety of new materials, made of a wide variety of types, widely used in livelihood machines, industrial machines, industrial test equipment, its research and development is very active.Sensor technology using integrated circuit technology, Thin film technology, fine processing technology to achieve the miniaturization, high integration, multi-functional and high reliability, has taken a remarkable development.Sensors sensing the object from temperature to micro-organisms, a wide range, a wide range of sensors due to use Different from the use of different materials, different production technology here only physical sensors, chemical sensors, biological (ion) sensors for the development of a brief introduction of physical sensors - the use of fine processing technology made of micro-capsule pressure Sensor, integrated circuit micro-probe. This pressure sensor will cut the bottom of the silicon etching etching, the formation of voids, then hollow silicon nitride will be closed, suitable for ultra-small case. And the micro-probe is etching etching , Make a probe,