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以无机锆盐为原料 ,用溶胶 -凝胶 (Sol- Gel)法成功地在 Pt/ Ti/ Si O2 / Si衬底上制备出一种新型Pb Ti O3/ Pb(Zr0 .5 3Ti0 .47) O3/ Pb Ti O3(PT/ PZT/ PT)夹心结构。这种新结构对于 PZT的晶化有很好的促进作用 ,其最终的退火温度为 70 0°C。 C- V特性、介电频率响应、漏电等电性能测试表明这一新型夹心结构具有良好的铁电和介电性能。
A new type of PbTiO3 / Pb (Zr0.53Ti0.47) was successfully prepared on Pt / Ti / Si O2 / Si substrate by sol-gel method using inorganic zirconium salt as raw material. O3 / Pb Ti O3 (PT / PZT / PT) sandwich structure. The new structure of PZT for the crystallization of a good promotion, the final annealing temperature is 70 0 ° C. C-V characteristics, dielectric frequency response, leakage and other electrical performance tests show that the new sandwich structure has good ferroelectric and dielectric properties.