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Successful microactuators of simple mechanics on silicon chip are a prerequisite formonolithic microrobotic systems. Recent development in microelectromechanical systems (MEMS)has led to the success in building new types of microactuators. Based on the design of microgrip-pers and linear microvibromotor, which were fabricated using surface micromachining, the analysisof contact pairs and opposite movement forming of moving elements is given in this paper. Thesource and mechanism of tribology of MEMS are discussed. Associated with the developing his-tory of macro-machine, several research methods and possible existing problems about the tribol-ogy of surface IC processed MEMS are pointed out.
Successful microactuators of simple mechanics on silicon chip are a prerequisite formonolithic microrobotic systems. Recent developments in microelectromechanical systems (MEMS) has led to the success in building new types of microactuators. Based on the design of microgrip-pers and linear microvibromotor, which were were fabricated using surface micromachining, the analysis of contact pairs and opposite movement of of moving elements is given in this paper. Thesource and mechanism of tribology of MEMS are discussed. Associated with the developing his-tory of macro-machine, several research methods and possible existing problems about the tribol -ogy of surface IC processed MEMS are pointed out.