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基于扭臂式静电驱动结构的基本模型,在忽略和考虑空气阻尼作用的两种情况下,分别采用能量法和力电耦合分析方法得到扭臂式静电驱动器的pull-in电压。通过对比两种情况下的pull-in电压,得出了驱动结构参数变化时空气阻尼作用对pull-in电压的影响。结果表明,在一定范围内,随着上电极长度、上电极宽度的增加以及上下电极之间间距的减小,空气阻尼作用对pull-in电压的影响逐步增大;并且当上电极宽度增大或者上下电极之间间距减小到一定程度时,空气阻尼作用力甚至可以与驱动的静电力达到同一数量级,此时必须考虑空气阻尼作用的影响。
Based on the basic model of torsion arm electrostatic actuator, the pull-in voltage of the torsion arm type electrostatic actuator is obtained by energy method and force-coupled method respectively under the two cases of neglecting and considering the air damping. By comparing the pull-in voltage of the two cases, the influence of air damping on the pull-in voltage is obtained when the parameters of the driving structure change. The results show that the influence of air damping on the pull-in voltage gradually increases with the increase of the length of the upper electrode and the width of the upper electrode and the decrease of the spacing between the upper and lower electrodes within a certain range. When the width of the upper electrode is increased Or when the spacing between the upper and lower electrodes is reduced to a certain degree, the air damping force may even reach the same order of magnitude as the electrostatic force driven, at this time, the influence of air damping must be considered.