论文部分内容阅读
主要探讨了一种基于多层多齿谐振光栅结构的高性能偏振无关反射镜。得益于TE和TM偏振光泄漏模谐振的共存及相互作用,该器件在1.65~1.72μm较宽的频谱范围内具有反射率大于97%、角度带宽约为24.6°、插入损耗小于0.25dB、偏振相关损耗小于0.18dB的优越性能。通过严格耦合波分析方法验证了此器件在现有工艺误差范围内具有较好的工艺容差性。
A high performance polarization independent mirror based on multilayer multi-tooth resonant grating structure is mainly discussed. Due to the coexistence and interaction of resonant modes of TE and TM polarized light leakage modes, the device has the reflectivity of more than 97%, the angular bandwidth of about 24.6 ° and the insertion loss of less than 0.25 dB over a wide spectral range of 1.65 ~ 1.72 μm, Polarization-related losses less than 0.18dB superior performance. Through rigorous coupled-wave analysis method, it is verified that the device has good process tolerance in the existing process error range.