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涡轮分子泵,钛升华泵各自对不同种类的气体有不同的排气性能。利用它们的特性来互相弥补彼此间的缺欠而获得低的极限压强和大的抽速。本文叙述了这种装置的设计方法和试验情况。从设计出发点至达到的预想效果都进行了较系统的介绍。该装置得到了满意的效果,获得10-11托的极限压强,对氮气或空气的抽速为3000开/秒左右,而对于氢气的抽速为1万升/秒。并对涡轮分子泵和钛升华泵联用的系统获得超高真空的方法进行了讨论。
Turbomolecular pumps, titanium sublimation pump each have different exhaust properties of different types of gases. Use their characteristics to make up for each other’s shortcomings and achieve low ultimate pressure and high pumping speed. This article describes the design of this device and test conditions. From the design of the starting point to achieve the desired effect have been more systematic introduction. The unit achieved satisfactory results with an ultimate pressure of 10-11 Torr, with a draw rate of about 3000 on / s for nitrogen or air, and 10,000 liters per second for hydrogen. The method of obtaining ultra-high vacuum in the system of turbomolecular pump and titanium sublimation pump is discussed.