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俄歇电子谱仪在表面物理的研究中几乎是必不可少的工具。现已广泛的应用于冶金、半导体工艺、化工、能源、医药等领域,成为质量检测和基础研究的一种有力手段。其特点是:检测的信息深度为1～5个单分子层,以其能量分析的结果提供固体表面组分的可能的化学环境的资料。具有面灵敏度高(可以检测0.1%的单原子层)、分析速度快、可做定性和定量分析、表面破坏小(可以认为是无损检测)等优点。我们准备以两讲的内容介绍俄歇电子谱仪。考虑到本刊1982年第一期曾经刊登了“用
Auger electron spectroscopy in surface physics research is almost an indispensable tool. Has been widely used in metallurgy, semiconductor technology, chemical industry, energy, medicine and other fields, as a means of quality inspection and basic research. Its characteristics are: the depth of information to be detected 1-5 monolayers, with its energy analysis results provide a solid chemical composition of the possible chemical environment. With surface sensitivity (can detect 0.1% of the single atomic layer), the analysis speed, can do qualitative and quantitative analysis, the surface damage is small (which can be considered as non-destructive testing) and so on. We are going to introduce Auger electron spectrometers in two separate sections. Taking into account the first issue of 1982 published a "use