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1.前言最近,超精密测量也就是所谓的光技术,由于应用光的测量技术能够以非接触方式进行高分辨率的测量,所以随着科学和工业的进展而成为不可缺少的技术。特别是光波干涉利用其重复性可以达到高精度,可用于精密测量。图1示出利用光的精密测量法的测量范围和相对不确定度。本文介绍利用光的高分辨率、高精度的测量技术的现状及其展望
1. Introduction Recently, ultra-precision measurement is also called optical technology. Since optical measurement technology enables high-resolution measurement in a non-contact manner, it has become an indispensable technology with the advancement of science and industry. Especially the lightwave interference can achieve high precision by using its repeatability and can be used for precision measurement. Figure 1 shows the measurement range and relative uncertainty of a precision measurement method using light. This article describes the status and prospects of high-resolution, high-precision measurement using light