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为了进行超精密定位,我们提出了运用扭轮摩擦传动。要提高常规的扭轮摩擦驱动的定位精度,所提出的方案有两个主要特征:(1)主动轴与从动轴之间的扭角非常小。(2)从动轮由液体静压轴承支撑。扭轮是一种机械上的丝杠,小的扭角使得摩擦驱动的导程小于0.1mm,静压轴承的应用对于提高从动轮的旋转精度,以及消除旋动过程中波动对定位精度的影响是有效的。实验结果证明,定位分辨率小于10nm,这种扭轮摩擦传动特别适合超精密定位。
For super-precision positioning, we propose the use of torsional friction drive. There are two main features of the proposed solution to improve the positioning accuracy of a conventional torsional friction wheel drive: (1) The torsion angle between the drive shaft and the driven shaft is very small. (2) driven wheel by the hydrostatic bearing support. The torsion wheel is a kind of mechanical lead screw. The small torsion angle makes the lead of the friction drive less than 0.1mm. The application of the hydrostatic bearing improves the rotation precision of the driven wheel and eliminates the influence of fluctuation on the positioning accuracy during the rotation It is effective. Experimental results show that positioning resolution is less than 10nm, this type of torsion wheel friction transmission is particularly suitable for ultra-precision positioning.