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微缺陷对化学气相沉积硫化锌(CVDZnS)的光学及力学性能有显著影响。对沉积工艺进行了介绍,通过SEM、TEM及金相对CVDZnS中的微缺陷如异常大晶粒、柱状晶、微裂纹、微孔及杂质的结构形态进行了观测,并对形成原因进行了分析:高的沉积生长速率是生成异常大晶粒的主要原因;反应物浓度高加之衬底表面的屏蔽效应及Zn/H2S<1形成结构疏松的柱状晶组织;沉积温度较低加大沉积生长应力,宏观上产生材料的起拱,微观上造成晶粒的弯曲形变,并在晶体内产生大量微裂纹;沉积室局部反应物浓度高导致微孔及杂质的产生,须改善沉积室气体流形提高反应物浓度的均匀性。
Microdefects have a significant impact on the optical and mechanical properties of CVDZnS. The deposition process was introduced and the micro-defects such as abnormal large grains, columnar grains, micro-cracks, micropores and impurities in CVDZnS were observed by SEM, TEM and gold. The formation causes were also analyzed. High depositional growth rate is the main reason for the formation of abnormally large grains. The high concentration of reactants combined with the shielding effect on the surface of the substrate and the formation of columnar crystalline structure with Zn / H2S <1 are loose; the deposition temperature is lower and the depositional growth stress is increased, Macroscopically, the arching of the material leads to the bending deformation of the grains microscopically and produces a large number of microcracks in the crystals. The high concentration of local reactants in the deposition chamber leads to the generation of micropores and impurities. The gas manifold in the deposition chamber needs to be improved to improve the reaction The uniformity of the material concentration.