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本文研究了摩擦系数ｆ、涂层弹性模量Ｅｃ对气相沉积超硬涂层膜／基体系承载能力的影响规律，获得了不同的Ｅｃ及ｆ条件下膜／基界面两侧的应力的分布规律，以及应力极值随参数Ｅｃ与ｆ的变化曲线，指出摩擦系数的最佳范围为ｆ≤０．２５；涂层膜量Ｅｃ应尽可能与底材模量接近；并指出ｆ对超硬涂层的失效形式的影响；随着ｆ增大，膜／基体系失效形式由底材屈服导致涂层拉裂，转化为涂层剪断与剥离。其结论为正确选用合适的涂层、基体材料、沉积工艺及确定膜／基体系应用工况提供了依据。
In this paper, the influence of friction coefficient f and coating elastic modulus Ec on the bearing capacity of vapor-deposited superhard coating film / matrix system was studied. The distribution of stress on both sides of the film / base interface under different Ec and f conditions was obtained , And the extremum of stress varies with the curve of parameters Ec and f, indicating that the optimal range of friction coefficient is f≤0.25; the amount of coating film Ec should be as close as possible to the substrate modulus; Layer failure modes; as f increases, the failure mode of the film / substrate system yielding from the substrate leads to the coating cracking, which translates into coating shearing and peeling. The conclusion provides the basis for proper selection of suitable coatings, substrate materials, deposition processes and determination of the application conditions of the film / base system.