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Sensym 公司传感器的敏感元件是一个硅应变膜片,它是在硅-陶瓷基片上,制作应变电阻桥和温度补偿电阻,利用硅材料的压阻效应和半导体电阻-温
The sensor of Sensym’s sensor is a silicon strain diaphragm, which is fabricated on a silicon-ceramic substrate to make a strain-resistant bridge and a temperature-compensated resistor that utilizes the piezoresistive effect of the silicon material and the semiconductor resistance-temperature