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一、引言自从半导体技术问世以来,由于半导体新理论、新器件、新材料、新工艺和新设备的不断提出和涌现以及这些学科之间紧密配合和互相促进,近年来半导体技术得到了迅速的发展。其典型的例子是半导体器件的迅速进展。半导体器件,以其小型、可靠、高效率和低功耗等优点,有力地促进了整机的发展,深受整机研制单位的重视。比如半导体固体电路技术,小巧玲珑的半导体集成电路已取代了笨
I. INTRODUCTION Since the advent of semiconductor technology, semiconductor technology has been rapidly developed in recent years due to the continuous introduction and emergence of new semiconductor theories, new devices, new materials, new processes and devices, and the close cooperation and mutual promotion of these disciplines . A typical example of this is the rapid progress of semiconductor devices. Semiconductor devices, with its small, reliable, high efficiency and low power consumption, etc., effectively promoted the development of machine, by the machine research unit attention. Such as semiconductor solid-state circuit technology, small and exquisite semiconductor integrated circuits have replaced stupid