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利用PtSi与P-Si接触,研制成功肖特基势垒红对光电探测器(简称PtSi/P-SiIR-SBD)。在液氮温度(77K)下,对1.52μm红外光,它的灵敏度为2.69×10-2A/W,量子效率为2.4%,反偏4V时的漏电流为5×10-5μA。此外,对PtSi/P-SiIR-SBD的量子效率进行了计算机模拟计算。
The Schottky barrier red photodetector (PtSi / P-SiIR-SBD) was successfully developed by using PtSi and P-Si contacts. At liquid nitrogen temperature (77K), the sensitivity of 1.52μm infrared light is 2.69 × 10-2A / W, the quantum efficiency is 2.4% and the leakage current is 4 × 10- 5μA. In addition, the quantum efficiency of PtSi / P-SiIR-SBD was calculated by computer simulation.