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We present a magnetic force microscopy study of alteate sputtered (001) oriented L10 phase FePt films. It is found that the root-mean-square value of phase shift of magnetic force images, (△φ) can be used to char acterize the perpendicular anisotropy for a series of specimens. Therefore, the considerable improvement of the perpendicular anisotropy after post-annealing can be characterized.