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持续光电导(PPC)现象是影响AlxGa1-xN薄膜紫外探测器探测快速变化信号的一个不利因素,它的存在会大大延长探测器的响应时间。文章讨论了晶界对AlxGa1-xN薄膜紫外探测器时间响应性能的影响。实验结果表明,制作在高晶界密度薄膜上的紫外探测器表现出显著的PPC现象,而制作在低晶界密度薄膜上的紫外探测器则具有较快的时间响应,PPC现象明显减弱。这表明存在于晶界的缺陷可能是导致PPC现象的主要原因。通过提高薄膜结晶质量、降低薄膜晶界密度,可大大改善探测器的时间响应特性。
Persistent photoconductivity (PPC) is a detrimental factor affecting the AlxGa1-xN thin film UV detector in detecting rapidly changing signals, and its presence greatly extends the detector response time. The effects of grain boundaries on the time response of AlxGa1-xN thin film UV detectors are discussed. The experimental results show that the UV detector fabricated on the high grain boundary density film shows a significant PPC phenomenon, while the ultraviolet detector fabricated on the low grain boundary density film has a faster time response and the PPC phenomenon is obviously weakened. This shows that the defects existing in the grain boundary may be the main cause of PPC phenomenon. By improving the quality of the film crystallization and reducing the grain boundary density of the film, the time response characteristics of the detector can be greatly improved.