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1 INTRODUCTIONMetal organicchemicaldeposition(MOCVD)isanappealingtechniqueforelec tronicapplications.AsoneoftheMOCVDsourcematerial
1 INTRODUCTIONMetal organicchemicaldeposition (MOCVD) isanappealingtechniqueforelec tronicapplications.AsoneoftheMOCVDsourcematerial