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本文报道了共轴反射式电光取样系统。该系统时间分辨率不低于20ps,空间分辨率不低于3μm。用它检测了砷化镓共面波导内部的微波信号。这套系统将被应用于砷化镓高速集成电路内部特性的在片检测。
This paper reports coaxial reflection electro-optic sampling system. The system time resolution of not less than 20ps, spatial resolution of not less than 3μm. Use it to detect the microwave signal inside the gallium arsenide coplanar waveguide. The system will be used in the gallium arsenide high-speed IC in-chip testing of the internal characteristics.