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等离子增强磁控溅射TiSiCN基纳米复合镀层耐冲蚀性能研究介绍了等离子增强磁控溅射(PEMS)技术,系统研究了其制备的TiSiCN纳米复合镀层。首先讨论该技术工作原理,并描述了镀层的制备工艺过程。镀层性
Plasma Enhanced Magnetron Sputtering TiSiCN Based Nanocomposite Coatings The erosion resistance of plasma enhanced magnetron sputtering (PEMS) technology was introduced to systematically study the preparation of TiSiCN nano-composite coatings. First of all, the working principle of the technology is discussed and the preparation process of the coating is described. Coating properties