论文部分内容阅读
研究了铁电电容的制作工艺，摸索了Ｐ（Ｌ）铁电薄膜及上、下电极材料的微细图形加工工艺条件，总结出切实可行的工艺流程及相应的工艺条件。
The fabrication process of ferroelectric capacitor was studied. The process conditions of fine pattern processing of P (L) ferroelectric thin film and upper and lower electrode materials were explored. The feasible process flow and the corresponding process conditions were summarized.