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用光子学方法研究了叠栅技术中,当试件光栅被拉压和旋转后,叠栅条纹的空间周期和相对于基准光栅的取向,试件光栅被拉压后的节距等相关问题。根据衍射光波的空间周期可能大于试件光栅空间周期的特点,对二维亚波长周期结构衍射成像进行了设计研究。首先,对二维亚波长周期结构衍射物进行编码,以获得包含编码光栅空间信息的均匀波;其次,使编码得到的均匀波通过光学系统,并被放大到CCD相机所能辨识的大小;再次,经解码光栅解码,滤掉编码波,最终获得二维亚波长周期结构物的空间结构信息,达到超分辨的目的。同时,对成像过程进行了较为详尽的分析,对编码器、解码器的位置以及它们相对衍射物的取向进行了设计研究,对滤波器的选择给予了必要的说明,指出了取得超分辨成像的关键。
Using photon method, the related problems such as the pitch and pitch of the grating and the orientation of the grating after the sample grating is pulled and pressed are analyzed. According to the fact that the spatial period of the diffracted light wave may be larger than the spatial period of the grating of the test piece, the diffraction imaging of the two-dimensional subwavelength periodic structure is designed and studied. First, the two-dimensional subwavelength periodic structure diffraction object is encoded to obtain a uniform wave containing the encoded grating spatial information; second, the encoded uniform wave is passed through the optical system and magnified to a size recognizable by the CCD camera; , Decoded by the decoding grating, filter out the encoded wave and finally obtain the spatial structure information of two-dimensional subwavelength periodic structures to achieve the purpose of super-resolution. At the same time, the imaging process is analyzed in detail. The design of the position of encoder and decoder and the orientation of their relative diffractors are also studied. The necessary choice of filter is given. The essential.