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为了提高SiO2微悬臂梁动态检测灵敏度,对T型SiO2微悬臂梁的制备和高阶谐振模态传感器进行了研究。以绝缘体上Si(SOI)为起始材料制备了不同长度T型SiO2微悬臂梁,利用原子力显微镜(AFM)中精密的光学位置敏感检测器及数据处理系统对其频率进行表征,获得了与仿真结果相一致的数据。基于高阶谐振模态的免疫反应结果表明,对于相同的质量变化量,微悬臂梁的弯曲振动模式阶数越高,其频率偏移越大,从而达到较高的灵敏度;实验制备的SiO2微悬臂梁前三阶弯曲振动模式的检测灵敏度分别为1.36、9.78和26.92Hz/pg,利用二阶弯曲振动模式可检测出21.5pg的分子吸附。
In order to improve the dynamic detection sensitivity of SiO2 microcantilever, the preparation of T-type SiO2 microcantilever and the high-order resonant mode sensor were studied. T-type SiO2 micro-cantilevers with different lengths were prepared by using Si (SOI) as a starting material. The frequency was characterized by a precision optical position-sensitive detector in AFM and a data processing system. The result is consistent with the data. The results of immune response based on high-order resonant modes show that for the same mass variation, the higher the order of the bending vibration mode of the micro-cantilever, the larger the frequency shift of the micro-cantilever is and the higher the sensitivity. The prepared SiO2 micro The detection sensitivity of the first third-order bending vibration mode of the cantilever was 1.36, 9.78 and 26.92 Hz / pg respectively, and the second-order bending vibration mode could detect the molecular adsorption of 21.5 pg.